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2023
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Different types of MPCVD diamond deposition equipment and systems
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Rectangular quartz‑tube MPCVD is one of the earliest diamond‑deposition systems. Due to the direct contact between the quartz tube and the plasma, this configuration suffers from poor heat dissipation and severe etching, making it difficult to achieve high‑power diamond deposition. As a result, it has largely been phased out.
Rectangular quartz-tube MPCVD is one of the earlier types to have emerged. Diamond deposition equipment . Rectangular quartz-tube MPCVD Diamond deposition equipment Because the reactor design places the quartz tube in direct contact with the plasma, it suffers from poor heat dissipation and severe etching, making it difficult to achieve high‑power diamond deposition. Consequently, this configuration has largely been abandoned.
The design of the chamber in the ellipsoidal resonant cavity MPCVD diamond deposition system is primarily based on the principle that an ellipsoid has two foci. In this ellipsoidal resonant cavity, microwaves are fed into one focus via an antenna, generating a stable electric field at the other focus. A quartz bell jar is positioned at the lower focus, and a water-cooled substrate holder is placed inside it; the plasma is ignited at the focal point within the quartz bell jar.
Ellipsoidal Resonant Cavity MPCVD Diamond deposition equipment Advantages of the device: The intensity and spatial position of the excited plasma are highly stable; regardless of changes in gas pressure or microwave power, the plasma remains consistently above the substrate holder and maintains good contact with it. Moreover, the coupling efficiency between the microwave field and the plasma is exceptionally high, eliminating the need for additional components to match the system’s impedance. Compared with cylindrical‑cavity MPCVD systems, the ellipsoidal‑cavity MPCVD configuration is better suited to high‑power, high‑pressure diamond deposition conditions. However, the ellipsoidal cavity has a larger footprint, and its use of a quartz bell jar to enclose the substrate holder poses challenges for system cooling, thereby limiting its practical applications to some extent.
Compared with other types of MPCVD diamond deposition systems, the cylindrical‑cavity MPCVD reactor offers advantages such as easier excitation of large‑area, uniform microwave‑plasma spheres, a simpler structure, and ease of fabrication, making it one of the most widely used MPCVD configurations today.
Depending on the cavity sealing method, cylindrical resonant cavities can be classified into quartz bell‑jar resonant cavities and stainless‑steel resonant cavities equipped with circular flat quartz windows.
Due to the absence of contamination from a metallic chamber, quartz‑bell‑type reactors can provide a cleaner diamond‑deposition environment compared with flat‑plate quartz‑window reactors, and their plasma distribution can be tailored through design modifications of the bell‑shaped enclosure. However, in terms of manufacturing cost and thermal management of the quartz windows, the flat‑plate quartz‑window configuration is preferable to the quartz‑bell‑type design, owing to the larger surface area of the bell.
Diamond deposition equipment
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