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2023
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Structure and Classification of MPCVD Diamond Deposition Equipment
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MPCVD diamond deposition systems are typically divided into four major components: the microwave system, the vacuum system, the gas supply system, and the plasma reaction chamber.
MPCVD Diamond deposition equipment The apparatus is typically divided into four major components: the microwave system, the vacuum system, the gas supply system, and the plasma reaction chamber.
The microwave system consists of a microwave power source, a circulator, a water load, and an impedance tuner.
The vacuum system consists of a vacuum pump, vacuum valves, and vacuum measurement instruments.
The gas supply system consists of a gas source, piping, and components such as valves and flow meters for controlling gas flow.
Each of these three components is universally applicable and can be used with various types of MPCVD systems.
The plasma reaction chamber comprises a microwave–plasma coupler, a vacuum deposition chamber, and a substrate holder, among other components.
Different types of MPCVD Diamond deposition equipment The devices differ primarily in the configuration of their plasma reaction chambers. Based on chamber geometry, they can be broadly classified into three types: rectangular, ellipsoidal, and cylindrical microwave plasma chemical vapor deposition (MPCVD) reactors. Furthermore, according to the mode of electric field generation within the microwave plasma resonant cavity, MPCVD systems are generally categorized as either single-mode or multi-mode resonant cavities.
Additionally, depending on the microwave frequency, MPCVD can be classified as… Diamond deposition equipment The equipment is categorized into 2.45 GHz and 915 MHz types. Due to limitations imposed by the resonant cavity design, conventional 2.45 GHz systems currently struggle to deposit and fabricate ultra‑large‑size diamonds. Compared with 2.45 GHz microwaves, 915 MHz microwaves have longer wavelengths, enabling a broader excitation of the electric field and a larger plasma volume, which is more conducive to the preparation of large‑size diamonds. However, 915 MHz systems face technical challenges such as high cost, poor stability, complex chamber‑structure design, and difficult heat dissipation, all of which currently constrain their large‑scale deployment.
Diamond deposition equipment
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