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2022
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Raman Spectroscopic Characterization of Diamond Films
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In general, every substance possesses its own characteristic Raman shift frequency; thus, by measuring the Raman spectrum, we can distinguish between a material’s molecular and lattice structures. Because laser Raman spectroscopy is highly sensitive to carbon–carbon bonds, it is widely employed to assess the quality of diamond‑film growth, primarily by evaluating the shifts in the laser‑induced Raman scattering that arise from quasiparticle excitations such as phonon spectra.
Raman Spectroscopic Characterization of Diamond Films
In general, every substance possesses its own characteristic Raman shift frequency; thus, by measuring the Raman spectrum, we can distinguish between a material’s molecular and lattice structures. Because laser Raman spectroscopy is highly sensitive to carbon–carbon bonds, it is widely employed to assess the quality of diamond‑film growth, primarily by evaluating shifts in the laser‑induced Raman scattering that arise from quasiparticle excitations such as phonon modes in the sample. Today, Raman spectroscopy stands as one of the most commonly used, nondestructive, rapid, and high‑resolution techniques for characterizing diamond. Raman spectral analysis of CVD diamond films typically focuses on the following four aspects:
1. Both natural and CVD diamond films exhibit a tetrahedral crystal structure, in which carbon atoms are bonded via sp³ hybridization; consequently, the Raman characteristic peak of diamond appears at 1332 cm⁻¹. Accordingly, during Raman spectral analysis, the magnitude of the wavenumber shift relative to the standard peak position can be used to determine whether the stress in the diamond film is compressive or tensile, and its quantitative value can also be estimated.
2. During the CVD growth of diamond films, if the growth conditions are compromised, non‑diamond phases—namely graphite—are readily formed. In the graphite phase, carbon atoms are bonded via sp² hybridization, and the scattering peak characteristic of crystalline graphite typically appears near 1580 cm⁻¹.
3. In CVD diamond thin films, the amorphous carbon component associated with the sp2 phase typically appears as a broad scattering band centered at 1350–1600 cm⁻¹, with its precise position determined by the relative concentration of amorphous carbon impurities in the diamond film.
4. In Raman spectroscopy, the fluorescence background that exhibits an upward trend from low to high frequencies primarily originates from the photoluminescence of amorphous carbon.
Diamond film
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