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2022

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Uniformity of diamond film growth

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Single-crystal diamond is an ancient crystalline material; diamonds are, in fact, single-crystal diamonds that have been meticulously designed and cut. Since antiquity, diamonds have been revered as precious gems for their dazzling appearance and exceptional hardness. With advances in science and technology, the remarkable material properties of single-crystal diamond have been progressively unveiled, and this time-honored crystalline material has once again become a focal point in both industry and research over the past few decades.

Uniformity of diamond film growth


Single-crystal diamond is an ancient crystalline material; diamonds are, in fact, single-crystal diamonds that have been meticulously designed and cut. Since antiquity, diamonds have been revered as precious gems for their dazzling appearance and exceptional hardness. With advances in science and technology, the remarkable material properties of single-crystal diamond have been progressively unveiled, and this time-honored crystalline material has once again become a focal point in both industry and research over the past few decades.

The applications of high‑quality single‑crystal diamond typically impose stringent size requirements, necessitating effective control over the uniformity of growth quality across large‑area single crystals and the continuity of growth for thick‑walled single crystals. Due to the principles and characteristics of MPCVD diamond growth, plasma energy tends to concentrate at the edges and corners of the seed crystal, leading to non‑uniform distributions of plasma density and temperature on the seed surface—this phenomenon is known as the “edge effect.” The edge effect causes the growth rate at the seed’s corners to exceed that at its center, and it also promotes secondary nucleation at these sharp features, thereby giving rise to polycrystalline boundaries. As the seed crystal continues to grow, the polycrystalline regions gradually extend into the monocrystalline growth zone, resulting in uneven stress distribution and, in severe cases, cracking along the edges.


Currently, a common approach to mitigate edge effects and enhance crystal quality is the use of specially designed seed holders. Employing such holders improves the uniformity of the plasma and temperature‑field distribution around the seed, refines the morphology of the diamond film growth surface, and thereby controls the formation of polycrystalline regions at the edges. Furthermore, optimizing the initial thickness of the seed can also contribute to greater uniformity in the quality of the diamond film.


Diamond film

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