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2022
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Knowledge of Ellipsoidal Resonant Cavity–Type Diamond Deposition Equipment
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Ellipsoidal resonant‑cavity diamond deposition equipment emerged around 1997, designed and developed by the Fraunhofer Institute in Germany. Its structure closely resembles that of quartz‑bell‑jar‑type diamond deposition systems: both feature a large quartz bell jar and employ a coaxial‑antenna‑based converter for microwave mode conversion. The primary distinction between the two lies in their respective resonant cavities.
Knowledge of Ellipsoidal Resonant Cavity–Type Diamond Deposition Equipment
Ellipsoidal resonant‑cavity diamond deposition equipment emerged around 1997, designed and developed by the Fraunhofer Institute in Germany. Its structure closely resembles that of quartz‑bell‑type diamond deposition systems: both feature a large quartz bell‑shaped enclosure and employ a coaxial‑antenna‑based mode converter to facilitate microwave mode transformation. The primary distinction lies in the resonant cavity design. In the ellipsoidal resonant‑cavity system, the reaction chamber has an ellipsoidal geometry; as is well known, an ellipse has two foci. This device ingeniously exploits the principle that microwaves can be focused at the upper focal point: microwaves are radiated from the upper‑focal‑point antenna, reflected within the reaction chamber, and converge at the lower focal point—located directly above the substrate holder—thereby generating a high‑energy‑density plasma sphere. Moreover, because the metallic ellipsoidal reaction chamber is considerably larger, it can accommodate a correspondingly larger quartz bell, which effectively maintains a safe distance between the plasma sphere and the quartz material, preventing plasma erosion of the quartz bell and contamination of the diamond‑deposition environment. Such systems typically support microwave input powers of 10 kW or even higher.
While ellipsoidal resonant‑cavity diamond deposition equipment offers the aforementioned advantages, it also suffers from significant drawbacks that are difficult to overcome. First, the ellipsoidal shape of the resonant cavity is challenging to fabricate, driving up production costs. Second, this unconventional geometry makes it hard to ensure a reliable vacuum seal. Third, the equipment is relatively large in size and employs a quartz bell jar to enclose the substrate holder, which hinders effective heat dissipation. These limitations, to varying degrees, constrain the widespread adoption of ellipsoidal resonant‑cavity diamond deposition systems.
Diamond deposition equipment
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