UP-575 High-power MPCVD equipment
Numbering:
Microwave frequency: 2450±25MHz
Output power: 0.6kw~12kw continuously adjustable
Two-way coupler: power capacity greater than 15kw, insertion loss less than 0.5dB
Microwave leakage: 5cm away from the equipment, microwave leakage ≤ 2 mw/cm2
Description
Technical indicators and characteristics
1.Microwave system (using French Sairem microwave source) | |
Microwave frequency | 2450±25MHz |
Output power | 0.6kw~12kw continuously adjustable |
Two-way coupler | power capacity greater than 15kw, insertion loss less than 0.5dB |
Microwave leakage | 5cm away from the equipment, microwave leakage ≤ 2 mw/cm2 |
2.Vacuum system | |
Working pressure range | 10~300Torr |
Automatic voltage regulation range | 40~250Torr |
Vacuum pump | 6L/s dry pump |
System leak rate | <2×10-10 Torr·L/sec (detected by helium mass spectrometer leak detector) |
Cavity pressure holding capacity | pressure rise less than 0.2 Torr every 24 hours |
Background ultimate vacuum | 0.1Pa (7.5 x10-4 Torr) |
3.Vacuum reaction chamber and substrate stage | |
Reaction chamber material and structure | dish-shaped stainless steel reaction chamber |
Observation window | Four CF ports, 90° distribution. It can be used to measure temperature and observe the reaction chamber |
Motor control, can open and close the cover automatically | |
Molybdenum substrate table diameter | maximum 150mm, recommended diameter range 60mm ~75mm |
The sample table can rotate at a constant speed and move up and down | |
4.Gas path | |
The system comes with five MFC | |
Use flowmeter and flow control valve imported from Japan | |
5.Temperature measurement system | |
Use German brand infrared temperature measurement, range: 300~1300 degrees Celsius | |
6.Software | |
Equipped with 15" touch screen controlled by PLC, user-friendly operation interface, all operations can be done on the touch screen | |
Comes with automatic protection against water shortage, gas shortage, power supply phase loss, fireball jump, over temperature and overload, sparking, etc. | |
The production process is automatically controlled by the process formula, and up to ten sets of process formulas can be set | |
The system comes with preset processes such as automatic air extraction, ignition, heating, cooling, etc., which is easy for users to operate | |
Fully automatic temperature control and air pressure control greatly reduce the workload of system operators | |
7. Hydrogen generator | |
Use American Parker hydrogen generator | |
Hydrogen purity 99.99999%, maximum flow rate 1300sccm |
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