UP-206 Cylindrical MPCVD Equipment
Numbering：
UP-206 series metal cylindrical cavity MPCVD equipment has advanced design and reliable performance. The hardware configuration adopts well-known high-reliability brands in the industry to ensure long-term stable operation of the equipment. The software system adopts highly integrated PLC control, and all operations can be completed with one key on the touch screen. The process formula is powerful and can support up to 10 sets of automatic growth of different processes. Built-in constant temperature function, the equipment will automatically monitor and adjust after it is turned on, saving time and effort. It is very suitable for depositing single crystal diamond chips, artificial diamond rough, etc., and has been shipped to universities and enterprises in batches.
Description
Technical indicators and characteristics
| 1.Microwave system (using French Sairem microwave source) | |
| Microwave frequency | 2450±25MHz |
| Output power | 0.6kw~6kw continuously adjustable |
| Microwave leakage | 5cm away from the equipment, microwave leakage ≤ 2 mw/cm2 |
| 2.Vacuum system | |
| Working pressure range | 10~250Torr |
| Automatic voltage regulation range | 40~250Torr |
| Vacuum pump | 4.4L/s rotary vane vacuum pump is adopted |
| Leakage rate of the system | <1.0x10-9 Pa*m3 /sec (detected by a helium mass spectrometer leak detector) |
| Cavity pressure holding capacity | pressure rise less than 0.2 Torr every 24 hours |
| Background ultimate vacuum | 0.1Pa (7.5 x10-4 Torr) |
| 3.Vacuum reaction chamber and substrate stage | |
| Reaction chamber material and structure | double-layer water-cooled stainless steel reaction chamber |
| Electric lift type water-cooled substrate table, diameter 100mm | |
| Molybdenum substrate table diameter ≥50mm | |
| 4.Gas path | |
| The system comes with four channels of MFC, which can be expanded to six channels | |
| Use Japan Fujijin imported flowmeter and flow control valve | |
| 5.Temperature measurement system | |
| Use German brand infrared thermometer, range: 300~1300 degrees Celsius | |
| 6.Software | |
| Equipped with 15" touch screen controlled by PLC, user-friendly operation interface, all operations can be done on the touch screen | |
| Comes with automatic protection against water shortage, gas shortage, power supply phase loss, fireball jump, over temperature and overload, sparking, etc. | |
| The production process is automatically controlled by the process formula, and up to ten sets of process formulas can be set | |
| The system comes with preset processes such as automatic air extraction, ignition, heating, cooling, etc., which is easy for users to operate | |
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Fully automatic temperature control and air pressure control greatly reduce the workload of system operators |
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