UP-206 Cylindrical MPCVD Equipment
UP-206 Cylindrical MPCVD Equipment
UP-206 series metal cylindrical cavity MPCVD equipment has advanced design and reliable performance. The hardware configuration adopts well-known high-reliability brands in the industry to ensure long-term stable operation of the equipment. The software system adopts highly integrated PLC control, and all operations can be completed with one key on the touch screen. The process formula is powerful and can support up to 10 sets of automatic growth of different processes. Built-in constant temperature function, the equipment will automatically monitor and adjust after it is turned on, saving time and effort. It is very suitable for depositing single crystal diamond chips, artificial diamond rough, etc., and has been shipped to universities and enterprises in batches.

Technical indicators and characteristics


1.Microwave system (using French Sairem microwave source)
Microwave frequency 2450±25MHz
Output power 0.6kw~6kw continuously adjustable
Microwave leakage 5cm away from the equipment, microwave leakage ≤ 2 mw/cm2
2.Vacuum system
Working pressure range 10~250Torr
Automatic voltage regulation range 40~250Torr
Vacuum pump 4.4L/s rotary vane vacuum pump is adopted
Leakage rate of the system <1.0x10-9 Pa*m3 /sec (detected by a helium mass spectrometer leak detector)
Cavity pressure holding capacity pressure rise less than 0.2 Torr every 24 hours
Background ultimate vacuum 0.1Pa (7.5 x10-4 Torr)
3.Vacuum reaction chamber and substrate stage
Reaction chamber material and structure double-layer water-cooled stainless steel reaction chamber
Electric lift type water-cooled substrate table, diameter 100mm
Molybdenum substrate table diameter ≥50mm
4.Gas path
The system comes with four channels of MFC, which can be expanded to six channels
Use Japan Fujijin imported flowmeter and flow control valve
5.Temperature measurement system
Use German brand infrared thermometer, range: 300~1300 degrees Celsius
Equipped with 15" touch screen controlled by PLC, user-friendly operation interface, all operations can be done on the touch screen
Comes with automatic protection against water shortage, gas shortage, power supply phase loss, fireball jump, over temperature and overload, sparking, etc.
The production process is automatically controlled by the process formula, and up to ten sets of process formulas can be set
The system comes with preset processes such as automatic air extraction, ignition, heating, cooling, etc., which is easy for users to operate

Fully automatic temperature control and air pressure control greatly reduce the workload of system operators



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