UP-510 clamshell MPCVD equipment
Numbering：
UP-510 series automatic microwave plasma chemical vapor deposition system can be used for the deposition of single crystal diamond, large area single crystal, polycrystalline diamond film and other materials. UP-512 has the characteristics of high reliability, high stability, convenient operation and large deposition area. It is a mature industrial standard equipment and has been used in scientific research in universities and batch industrial production of enterprises. UP-512 series automatic microwave plasma chemical vapor deposition system can be used for the deposition of single crystal diamond, large area single crystal, polycrystalline diamond film and other materials. UP-512 has the characteristics of high reliability, high stability, convenient operation and large deposition area. It is a mature industrial standard equipment and has been used in scientific research in universities and batch industrial production of enterprises.
Description
Technical indicators and characteristics
| 1.Microwave system (using French Sairem microwave source) | |
| Microwave frequency | 2450±25MHz |
| Output power | 0.6kw~10kw continuously adjustable |
| Two-way coupler | power capacity greater than 15kw, insertion loss less than 0.5dB |
| Microwave leakage | 5cm away from the equipment, microwave leakage ≤ 2 mw/cm2 |
| 2.Vacuum system | |
| Working pressure range | 10~300Torr |
| Automatic voltage regulation range | 40~250Torr |
| Vacuum pump | 6L/s dry pump |
| System leak rate | <2×10-10 Torr·L/sec (detected by helium mass spectrometer leak detector) |
| Cavity pressure holding capacity | pressure rise less than 0.2 Torr every 24 hours |
| Background ultimate vacuum | 0.1Pa (7.5 x10-4 Torr) |
| 3.Vacuum reaction chamber and substrate stage | |
| Reaction chamber material and structure | dish-shaped stainless steel reaction chamber |
| Observation window | Four CF ports, 90° distribution. It can be used to measure temperature and observe the reaction chamber |
| Motor control, can open and close the cover automatically | |
| Molybdenum substrate table diameter | maximum 150mm, recommended diameter range 60mm ~75mm |
| The sample table can rotate at a constant speed and move up and down | |
| 4.Gas path | |
| The system comes with five MFC | |
| Use flowmeter and flow control valve imported from Japan | |
| 5.Temperature measurement system | |
| Use German brand infrared temperature measurement, range: 300~1300 degrees Celsius | |
| 6.Software | |
| Equipped with 15" touch screen controlled by PLC, user-friendly operation interface, all operations can be done on the touch screen | |
| Comes with automatic protection against water shortage, gas shortage, power supply phase loss, fireball jump, over temperature and overload, sparking, etc. | |
| The production process is automatically controlled by the process formula, and up to ten sets of process formulas can be set | |
| The system comes with preset processes such as automatic air extraction, ignition, heating, cooling, etc., which is easy for users to operate | |
| Fully automatic temperature control and air pressure control greatly reduce the workload of system operators | |
| 7. Hydrogen generator | |
| Use American Parker hydrogen generator | |
| Hydrogen purity 99.99999%, maximum flow rate 1300sccm | |
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