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1990
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- Time of issue:2021-05-12 16:02
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(Summary description)Professor Wu Qinchong officially undertook the national 863 project at the Plasma Physics Institute of the Chinese Academy of Sciences, conducting over ten years of research on microwave plasma equipment, and successively developed the first domestic quartz bell-jar type and metal cylindrical cavity type MPCVD equipment.
1990
(Summary description)Professor Wu Qinchong officially undertook the national 863 project at the Plasma Physics Institute of the Chinese Academy of Sciences, conducting over ten years of research on microwave plasma equipment, and successively developed the first domestic quartz bell-jar type and metal cylindrical cavity type MPCVD equipment.
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- Origin:
- Time of issue:2021-05-12 16:02
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Professor Wu Qinchong officially undertook the national 863 project at the Plasma Physics Institute of the Chinese Academy of Sciences, conducting over ten years of research on microwave plasma equipment, and successively developed the first domestic quartz bell-jar type and metal cylindrical cavity type MPCVD equipment.
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