1989～2000
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- Time of issue:2021-05-12 16:02
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(Summary description)Mr. Wu Qinchong undertook the National 863 Project in the Institute of Plasma of the Chinese Academy of Sciences. He has conducted more than ten years of research on microwave plasma equipment and has successfully developed the first domestic quartz bell jar type and metal cylindrical cavity type MPCVD equipment.
1989～2000
(Summary description)Mr. Wu Qinchong undertook the National 863 Project in the Institute of Plasma of the Chinese Academy of Sciences. He has conducted more than ten years of research on microwave plasma equipment and has successfully developed the first domestic quartz bell jar type and metal cylindrical cavity type MPCVD equipment.
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- Time of issue:2021-05-12 16:02
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Dr.Wu undertook the National 863 Project in the Institute of Plasma of the Chinese Academy of Sciences. He had been working more than ten years of research on microwave plasma equipment and successfully developed the first domestic quartz bell jar MPCVD system and cylindrical MPCVD equipment.
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